Clean air conditioning design for a chip production plant

Based on the project profile and process flow of a GaN power amplifier chip plant, presents the form of the clean air conditioning system, the calculation of cooling load, the determination of the clean air rate, the arrangement of fan filter unit (FFU) and dry coils, the return air in the grey area, the determination of the outdoor air rate and the outdoor air handling progress in detail. Elaborates the control systems of temperature, humidity and pressure difference, and presents the relevant energy saving measures.